发明授权
- 专利标题: System and method for direct imaging
- 专利标题(中): 用于直接成像的系统和方法
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申请号: US13956797申请日: 2013-08-01
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公开(公告)号: US08964274B2公开(公告)日: 2015-02-24
- 发明人: Stefan Heinemann , Wolfgang Retschke , Holger Wagner , Jonas Burghoff , Abraham Gross
- 申请人: Orbotech Ltd. , Laser Imaging Systems GmbH & Co. KG
- 申请人地址: IL Yavne DE Jena
- 专利权人: Orbotech Ltd.,Laser Imaging Systems GmbH & Co. KG
- 当前专利权人: Orbotech Ltd.,Laser Imaging Systems GmbH & Co. KG
- 当前专利权人地址: IL Yavne DE Jena
- 代理机构: Sughrue Mion, PLLC
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02F1/11 ; H04N1/04
摘要:
A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
公开/授权文献
- US20130321898A1 SYSTEM AND METHOD FOR DIRECT IMAGING 公开/授权日:2013-12-05
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