发明授权
- 专利标题: Optical assembly
- 专利标题(中): 光学组件
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申请号: US13235750申请日: 2011-09-19
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公开(公告)号: US08964162B2公开(公告)日: 2015-02-24
- 发明人: Damian Fiolka , Wilfried Clauss
- 申请人: Damian Fiolka , Wilfried Clauss
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102009014701 20090327
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G02B17/08 ; G02B26/08
摘要:
An optical assembly has at least one mirror with a mirror body. The latter is carried by a support body, which has a first support body portion and a second support body portion. An at least thermally separating region is arranged between the two support body portions. At least one surface portion of at least one of the support body portions or of a body thermally coupled thereto is modified in such a way that a thermal emission coefficient εm of the modified surface portion differs from a thermal emission coefficient εu of the unmodified surface portion by at least 10%. The result is an optical assembly, in which an improved thermal stability is achieved by the predetermining of the thermal emission coefficients.
公开/授权文献
- US20120019799A1 OPTICAL ASSEMBLY 公开/授权日:2012-01-26
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