发明授权
US08963141B2 Thin-film transistor, fabrication method thereof, and image display device
有权
薄膜晶体管及其制造方法以及图像显示装置
- 专利标题: Thin-film transistor, fabrication method thereof, and image display device
- 专利标题(中): 薄膜晶体管及其制造方法以及图像显示装置
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申请号: US13786039申请日: 2013-03-05
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公开(公告)号: US08963141B2公开(公告)日: 2015-02-24
- 发明人: Kodai Murata
- 申请人: Toppan Printing Co., Ltd.
- 申请人地址: JP
- 专利权人: Toppan Printing Co., Ltd.
- 当前专利权人: Toppan Printing Co., Ltd.
- 当前专利权人地址: JP
- 代理机构: Squire Patton Boggs (US) LLP
- 优先权: JP2010-212684 20100922
- 主分类号: H01L35/24
- IPC分类号: H01L35/24 ; H01L51/00 ; H01L29/786 ; H01L27/12 ; H01L51/05 ; H01L29/66
摘要:
A method for fabricating a thin-film transistor is provided whereby isolation of transistor devices is realized and the performance and the stability of the product thin-film transistor are improved. The thin-film transistor includes a substrate; a gate electrode laminated on the substrate; a gate insulating layer laminated on the substrate and the gate electrode; a recessed portion provided in the gate insulating layer; a semiconductor layer formed in the recessed portion of the gate insulating layer; and a source electrode and a drain electrode connected to the semiconductor layer at respective positions which are spaced apart from each other.
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