发明授权
US08963141B2 Thin-film transistor, fabrication method thereof, and image display device 有权
薄膜晶体管及其制造方法以及图像显示装置

Thin-film transistor, fabrication method thereof, and image display device
摘要:
A method for fabricating a thin-film transistor is provided whereby isolation of transistor devices is realized and the performance and the stability of the product thin-film transistor are improved. The thin-film transistor includes a substrate; a gate electrode laminated on the substrate; a gate insulating layer laminated on the substrate and the gate electrode; a recessed portion provided in the gate insulating layer; a semiconductor layer formed in the recessed portion of the gate insulating layer; and a source electrode and a drain electrode connected to the semiconductor layer at respective positions which are spaced apart from each other.
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