发明授权
- 专利标题: X-ray detector including oxide semiconductor transistor
- 专利标题(中): X射线检测器包括氧化物半导体晶体管
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申请号: US12926921申请日: 2010-12-17
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公开(公告)号: US08963096B2公开(公告)日: 2015-02-24
- 发明人: Sun-il Kim , Jae-chul Park , Sang-wook Kim , Chang-jung Kim
- 申请人: Sun-il Kim , Jae-chul Park , Sang-wook Kim , Chang-jung Kim
- 申请人地址: KR Gyeonggi-Do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-Do
- 代理机构: Harness, Dickey & Pierce P.L.C.
- 优先权: KR10-2010-0028616 20100330
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; G01T1/24 ; H01L31/08
摘要:
Example embodiments are directed an X-ray detector including an oxide semiconductor transistor. The X-ray detector including the oxide semiconductor transistor includes an oxide semiconductor transistor and a signal storage capacitor in parallel to each other on a substrate. The oxide semiconductor transistor includes a channel formed of an oxide semiconductor material, and a photoconductor. A pixel electrode and a common electrode are formed on opposite surfaces of the photoconductor. The channel includes ZnO, or a compound including ZnO and at least one selected from a group consisting of gallium (Ga), indium (In), hafnium (Hf), and tin (Sn).
公开/授权文献
- US20110240869A1 X-ray detector including oxide semiconductor transistor 公开/授权日:2011-10-06
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