Invention Grant
US08937369B2 Transistor with non-uniform stress layer with stress concentrated regions
有权
具有应力集中区域的不均匀应力层的晶体管
- Patent Title: Transistor with non-uniform stress layer with stress concentrated regions
- Patent Title (中): 具有应力集中区域的不均匀应力层的晶体管
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Application No.: US13633094Application Date: 2012-10-01
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Publication No.: US08937369B2Publication Date: 2015-01-20
- Inventor: Chih-Chien Liu , Tzu-Chin Wu , Yu-Shu Lin , Jei-Ming Chen , Wen-Yi Teng
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L21/469

Abstract:
A transistor includes a semiconductor substrate, at least a gate structure, at least a first tensile stress layer, a second tensile stress layer, a source region, and a drain region. The gate structure is disposed within a first transistor region of the semiconductor substrate. The first tensile stress layer includes a curved portion encompassing the gate structure, at least an extension portion with a curved top surface located on the semiconductor substrate at sides of the gate structure, and a transition portion between the curved portion and the extension portion. The first tensile stress layer has a thickness gradually thinning from the curved portion and the extension portion toward the transition portion. The second tensile stress layer is disposed on the first tensile stress layer. And the source/drain regions are separately located in the semiconductor substrate on two sides of the gate structure.
Public/Granted literature
- US20140091395A1 TRANSISTOR Public/Granted day:2014-04-03
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