Invention Grant
- Patent Title: Processing system having magnet keeper
- Patent Title (中): 具有磁力保持器的加工系统
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Application No.: US12895653Application Date: 2010-09-30
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Publication No.: US08919279B1Publication Date: 2014-12-30
- Inventor: Allen J. Bourez , Robert D. Hempstead , Jinliang Chen , Yew Ming Chiong
- Applicant: Allen J. Bourez , Robert D. Hempstead , Jinliang Chen , Yew Ming Chiong
- Applicant Address: US CA San Jose
- Assignee: WD Media, LLC
- Current Assignee: WD Media, LLC
- Current Assignee Address: US CA San Jose
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306
Abstract:
A processing system for and a method of producing ions inside a process chamber and shielding the ions from a magnetic field by directing the magnetic field through a magnet keeper is described.
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