发明授权
- 专利标题: Ultrasonic cleaning apparatus
- 专利标题(中): 超声波清洗设备
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申请号: US12225760申请日: 2007-09-10
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公开(公告)号: US08899247B2公开(公告)日: 2014-12-02
- 发明人: Hiroshi Hasegawa , Tomoharu Kamamura
- 申请人: Hiroshi Hasegawa , Tomoharu Kamamura
- 申请人地址: JP Tokyo
- 专利权人: Kaijo Corporation
- 当前专利权人: Kaijo Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Holtz, Holtz, Goodman & Chick PC
- 优先权: JP2006-257411 20060922
- 国际申请: PCT/JP2007/067581 WO 20070910
- 国际公布: WO2008/035581 WO 20080327
- 主分类号: B06B1/02
- IPC分类号: B06B1/02 ; B08B3/04 ; B08B3/10 ; B08B3/12 ; H01L21/67 ; H01L41/09
摘要:
The invention provides an ultrasonic cleaning apparatus in which unevenness of sound pressure among a plurality of oscillating elements is solved by emitting uniform ultrasonic waves, the rate of removal of fine particles is improved, and the uneven cleaning is avoided. The ultrasonic cleaning apparatus includes a cleaning bath that stores an object to be cleaned and cleaning solvent; a plurality of oscillating elements attached to the cleaning bath; a plurality of oscillators connected respectively to the plurality of oscillating elements for exciting the plurality of oscillating elements; and a controller connected to the plurality of oscillators for controlling the plurality of oscillators to output signals having the same phase or substantially the same phase to the plurality of oscillating elements.
公开/授权文献
- US20110079253A1 Ultrasonic Cleaning Apparatus 公开/授权日:2011-04-07
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