发明授权
- 专利标题: Device for classifying defects and method for adjusting classification
- 专利标题(中): 分类缺陷的设备和分类调整方法
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申请号: US13376390申请日: 2010-07-08
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公开(公告)号: US08892494B2公开(公告)日: 2014-11-18
- 发明人: Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
- 申请人: Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2009-172104 20090723
- 国际申请: PCT/JP2010/061581 WO 20100708
- 国际公布: WO2011/010557 WO 20110127
- 主分类号: G06F15/18
- IPC分类号: G06F15/18 ; G06T7/00
摘要:
Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).
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