发明授权
- 专利标题: Semiconductor substrate suitable for the realisation of electronic and/or optoelectronic devices and relative manufacturing process
- 专利标题(中): 半导体衬底适用于实现电子和/或光电器件的相关制造工艺
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申请号: US13299935申请日: 2011-11-18
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公开(公告)号: US08890103B2公开(公告)日: 2014-11-18
- 发明人: Giuseppe Alessio Maria D'Arrigo , Francesco La Via
- 申请人: Giuseppe Alessio Maria D'Arrigo , Francesco La Via
- 申请人地址: IT
- 专利权人: Consiglio Nazionale Delle Ricerche
- 当前专利权人: Consiglio Nazionale Delle Ricerche
- 当前专利权人地址: IT
- 代理机构: Akerman LLP
- 优先权: ITMI2007A0056 20070117
- 主分类号: H01L29/00
- IPC分类号: H01L29/00 ; H01L21/02
摘要:
A semiconductive substrate that is suitable for realising electronic and/or optoelectronic devices that include at least one substrate, in particular of single crystal silicon, and an overlying layer of single crystal silicon. Advantageously, the semiconductive substrate comprises at least one functional coupling layer suitable for reducing the defects linked to the differences in the materials used. The functional coupling layer can comprise a corrugated portion made in the layer of single crystal silicon and suitable for reducing the defects linked to the differences in lattice constant of such materials used. Alternatively, the functional coupling layer can comprise a porous layer arranged between the substrate of single crystal silicon and the layer of single crystal silicon, and suitable for reducing the stress caused by the differences between the thermal expansion coefficients of the materials used. A manufacturing process of such a semiconductive substrate is also described.
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