发明授权
- 专利标题: Optical position-measuring device
- 专利标题(中): 光学位置测量装置
-
申请号: US13472274申请日: 2012-05-15
-
公开(公告)号: US08890057B2公开(公告)日: 2014-11-18
- 发明人: Michael Hermann
- 申请人: Michael Hermann
- 申请人地址: DE Traunreut
- 专利权人: Dr. Johannes Heidenhain GmbH
- 当前专利权人: Dr. Johannes Heidenhain GmbH
- 当前专利权人地址: DE Traunreut
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102011076055 20110518
- 主分类号: G01D5/38
- IPC分类号: G01D5/38 ; G01D5/36
摘要:
An optical position-measuring device includes a measuring standard and a scanning unit. The measuring standard includes an incremental graduation and at least one reference marking at a reference position. The reference marking has two reference-marking subfields disposed in mirror symmetry relative to a reference-marking axis of symmetry, each of the subfields including a grating structure having a locally changeable graduation period. The scanning unit includes a divergently emitting light source, one or more gratings, and a reference-signal detector system. The reference-signal detector system has at least four detector arrays formed and positioned such that, from the scanning of the reference marking via the reference-signal detector system, first and second pairs of partial reference signals result, in each case having a signal pattern in phase opposition. The first pair of partial reference signals is offset by an offset amount relative to the second pair of partial reference signals.
公开/授权文献
- US20120292493A1 Optical Position-Measuring Device 公开/授权日:2012-11-22
信息查询
IPC分类: