Invention Grant
US08889444B2 Method of manufacturing transistor, transistor, array substrate and display device
有权
制造晶体管,晶体管,阵列基板和显示装置的方法
- Patent Title: Method of manufacturing transistor, transistor, array substrate and display device
- Patent Title (中): 制造晶体管,晶体管,阵列基板和显示装置的方法
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Application No.: US13876630Application Date: 2012-11-28
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Publication No.: US08889444B2Publication Date: 2014-11-18
- Inventor: Chunsheng Jiang
- Applicant: Boe Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: Boe Technology Group Co., Ltd.
- Current Assignee: Boe Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201210091052 20120330; CN201210126730 20120426
- International Application: PCT/CN2012/085476 WO 20121128
- International Announcement: WO2013/143311 WO 20131003
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/00

Abstract:
Embodiments of the present invention provide a method for manufacturing a transistor, a transistor, an array substrate and a display device. The method comprises: forming a first source/drain metal layer on a substrate; forming an insulating layer above the first source/drain metal layer; forming a gate metal layer on the insulating layer; forming a gate insulating layer on the gate metal layer; forming a semiconductor layer above the gate insulating layer; forming an etching blocking layer on the semiconductor layer; forming a second source/drain metal layer above the etching blocking layer; forming an insulating layer above the second source/drain metal layer.
Public/Granted literature
- US20140054701A1 METHOD OF MANUFACTURING TRANSISTOR, TRANSISTOR, ARRAY SUBSTRATE AND DISPLAY DEVICE Public/Granted day:2014-02-27
Information query
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