Invention Grant
US08889444B2 Method of manufacturing transistor, transistor, array substrate and display device 有权
制造晶体管,晶体管,阵列基板和显示装置的方法

Method of manufacturing transistor, transistor, array substrate and display device
Abstract:
Embodiments of the present invention provide a method for manufacturing a transistor, a transistor, an array substrate and a display device. The method comprises: forming a first source/drain metal layer on a substrate; forming an insulating layer above the first source/drain metal layer; forming a gate metal layer on the insulating layer; forming a gate insulating layer on the gate metal layer; forming a semiconductor layer above the gate insulating layer; forming an etching blocking layer on the semiconductor layer; forming a second source/drain metal layer above the etching blocking layer; forming an insulating layer above the second source/drain metal layer.
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