发明授权
- 专利标题: Double-side polishing apparatus
- 专利标题(中): 双面抛光装置
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申请号: US13290646申请日: 2011-11-07
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公开(公告)号: US08888562B2公开(公告)日: 2014-11-18
- 发明人: Tadakazu Miyashita , Shogo Koyama
- 申请人: Tadakazu Miyashita , Shogo Koyama
- 申请人地址: JP Nagano
- 专利权人: Fujikoshi Machinery Corp.
- 当前专利权人: Fujikoshi Machinery Corp.
- 当前专利权人地址: JP Nagano
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2011-007407 20110118
- 主分类号: B24B7/00
- IPC分类号: B24B7/00 ; B24B9/00 ; B24B37/28
摘要:
In the double-side polishing apparatus, one end part of a slurry supply hole has a female-tapered face whose inner diameter is gradually increased toward a polishing face of a polishing plate. A pad hole, which corresponds to the slurry supply hole, is formed in a polishing pad covering the slurry supply hole. An edge of the pad hole is located in the slurry supply hole. A fixation pipe, in which a flange section facing the female-tapered face is formed at one end part, is fixed in the slurry supply hole. The edge of the pad hole is sandwiched and held between the female-tapered face of the slurry supply hole and the flange section of the fixation pipe.
公开/授权文献
- US20120184190A1 DOUBLE-SIDE POLISHING APPARATUS 公开/授权日:2012-07-19
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