发明授权
US08887757B2 Wafer check valve assembly and related methods of use 有权
晶圆止回阀总成及相关使用方法

Wafer check valve assembly and related methods of use
摘要:
Provided is a wafer check valve assembly comprising a body having a mating side including first, second and third surfaces and a shaft groove, a tapered surface of the mating side extends from the third surface toward an inlet side of the body and from a first end to a second end of a port opening; a retainer having a mating side including fourth, fifth and sixth surfaces; and a disc with a shaft; wherein, when the body, retainer and disc are mated together: the shaft is housed between the body and the retainer and within the shaft groove, the first and fourth surfaces are proximal, the second and fifth surfaces are proximal, and the third and sixth surfaces proximal, so to define a pocket housing a gasketing material to form a seal between the body and retainer and to secure together the body, retainer, and disc.
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