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US08879880B2 Surface plasmon optical waveguide 有权
表面等离子体光波导

Surface plasmon optical waveguide
摘要:
A surface plasmon optical waveguide includes a lower cladding, a metal thin layer on the lower cladding, low-k dielectric layers spaced apart from each other on one surface of the metal thin layer, and an upper cladding covering the low-k dielectric layers and the metal thin layer uncovered between the low-k dielectric layers. A refractive index of the low-k dielectric layers is less than a refractive index of the lower and upper claddings.
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