发明授权
- 专利标题: Inductively-coupled plasma device
- 专利标题(中): 感应耦合等离子体装置
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申请号: US13539829申请日: 2012-07-02
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公开(公告)号: US08878434B2公开(公告)日: 2014-11-04
- 发明人: James A. Gilbert
- 申请人: James A. Gilbert
- 申请人地址: US MA Mansfield
- 专利权人: Covidien LP
- 当前专利权人: Covidien LP
- 当前专利权人地址: US MA Mansfield
- 主分类号: H05H1/30
- IPC分类号: H05H1/30 ; H01J37/32 ; H05H1/46 ; H05H1/24
摘要:
A plasma device configured to receive ionizable media is disclosed. The plasma device includes a first pair of dielectric substrates each having an inner surface and an outer surface. The first pair of dielectric substrates is disposed in spaced, parallel relation relative to one another with the inner surfaces thereof facing one another. The device also includes a first pair of spiral coils each disposed on the inner surface of the dielectric substrates. The first pair of spiral coils is configured to couple to a power source and configured to inductively couple to an ionizable media passed therebetween to ignite the ionizable media to form a plasma effluent.
公开/授权文献
- US20120268010A1 Inductively-Coupled Plasma Device 公开/授权日:2012-10-25
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