发明授权
- 专利标题: Transparent electronics based on transfer printed carbon nanotubes on rigid and flexible substrates
- 专利标题(中): 基于在刚性和柔性基底上转印碳纳米管的透明电子学
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申请号: US12538597申请日: 2009-08-10
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公开(公告)号: US08847313B2公开(公告)日: 2014-09-30
- 发明人: Chongwu Zhou , Fumiaki Ishikawa , Hsiao-Kang Chang , Koungmin Ryu
- 申请人: Chongwu Zhou , Fumiaki Ishikawa , Hsiao-Kang Chang , Koungmin Ryu
- 申请人地址: US CA Los Angeles
- 专利权人: University of Southern California
- 当前专利权人: University of Southern California
- 当前专利权人地址: US CA Los Angeles
- 代理机构: Saliwanchik, Lloyd & Eisenschenk
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; B82Y10/00 ; H01L51/00 ; H01L51/05
摘要:
Methods and devices for transparent electronics are disclosed. According to an embodiment, transparent electronics are provided based on transfer printed carbon nanotubes that can be disposed on both rigid and flexible substrates. Methods are provided to enable highly aligned single-walled carbon nanotubes (SWNTs) to be used in transparent electronics for achieving high carrier mobility while using low-temperature processing. According to one method, highly aligned nanotubes can be grown on a first substrate. Then, the aligned nanotubes can be transferred to a rigid or flexible substrate having pre-patterned gate electrodes. Source and drain electrodes can be formed on the transferred nanotubes. The subject devices can be integrated to provide logic gates and analog circuitry for a variety of applications.
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