发明授权
- 专利标题: Spatial light modulator with multiple linear arrays
- 专利标题(中): 具有多个线性阵列的空间光调制器
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申请号: US13429091申请日: 2012-03-23
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公开(公告)号: US08842359B1公开(公告)日: 2014-09-23
- 发明人: Alexander Payne , James Hunter
- 申请人: Alexander Payne , James Hunter
- 申请人地址: US CA Sunnyvale
- 专利权人: Silicon Light Machines Corporation
- 当前专利权人: Silicon Light Machines Corporation
- 当前专利权人地址: US CA Sunnyvale
- 代理商 William Nuttle
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A system including spatial light modulators with multiple one-dimensional (1D) diffractor arrays and methods of operating the same are provided. In one embodiment, the system comprises a spatial light modulator (SLM) assembly including a plurality of one-dimensional (1D) diffractor arrays to modulate light from a light source, the plurality of 1D diffractor arrays integrally formed on a die; illumination optics disposed in a light path between the plurality of 1D diffractor arrays and the light source to illuminate a substantially linear portion of at least one of the plurality of 1D diffractor arrays; and imaging optics disposed in a light path between the SLM assembly and an image plane on a target-substrate, the imaging optics adapted to transmit modulated light from the SLM assembly to a substantially linear portion of the image plane. Other embodiments are also provided.
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