发明授权
- 专利标题： Inspection tool and methodology for three dimensional voltage contrast inspection
- 专利标题（中）： 三维电压对比检查的检查工具和方法
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申请号： US12878089申请日： 2010-09-09
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公开(公告)号： US08841933B2公开(公告)日： 2014-09-23
- 发明人: Oliver D. Patterson
- 申请人： Oliver D. Patterson
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Howard M. Cohn; Ian D. MacKinnon; William H. Steinberg
- 主分类号： G01R31/02
- IPC分类号： G01R31/02 ; G01R31/307
摘要：
A system and method for improved voltage contrast inspection is disclosed. In one embodiment the temporal response to voltage contrast is considered to find an optimal acquisition time. In another embodiment, multiple optimal acquisition times are identified. The identified acquisition times are used in voltage contrast inspection of semiconductor fabrication, and are well-suited to SOI technology.
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