发明授权
- 专利标题: Method and system for providing a perpendicular magnetic recording head
- 专利标题(中): 用于提供垂直磁记录头的方法和系统
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申请号: US13779529申请日: 2013-02-27
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公开(公告)号: US08830628B1公开(公告)日: 2014-09-09
- 发明人: Hong Zhang , Ge Yi , Lei Wang , Dujiang Wan , Guanghong Luo , Xiaohai Xiang
- 申请人: Western Digital (Fremont), LLC
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: G11B5/17
- IPC分类号: G11B5/17
摘要:
A method and system for providing a magnetic recording transducer having a pole are disclosed. The pole has side(s), a bottom, and a top wider than the bottom. The method and system include providing at least one side gap layer that covers the side(s) and the top of the pole. At least one sacrificial layer is provided on the side gap layer(s). The sacrificial layer(s) are wet etchable and cover the side gap layer(s). The magnetic recording transducer is planarized after the sacrificial layer(s) are provided. Thus, a portion of the side gap and sacrificial layer(s) is removed. A remaining portion of the sacrificial layer(s) is thus left. The method and system also include wet etching the sacrificial layer(s) to remove the remaining portion of the sacrificial layer(s). A wrap around shield is provided after the remaining portion of the sacrificial layer(s) is removed.
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