发明授权
- 专利标题: Interferometric path and/or rotation measuring device
- 专利标题(中): 干涉路径和/或旋转测量装置
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申请号: US13379483申请日: 2010-06-18
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公开(公告)号: US08830482B2公开(公告)日: 2014-09-09
- 发明人: Pawel Drabarek
- 申请人: Pawel Drabarek
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102009027266 20090629
- 国际申请: PCT/EP2010/058597 WO 20100618
- 国际公布: WO2011/000715 WO 20110106
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01D5/347 ; G01B9/02 ; G01D5/38
摘要:
An interferometric path and/or rotation measuring device has a transducer unit with grating element, which transducer cooperates with a light conductor unit and a light pickup unit to detect a linear and/or rotational movement of the grating element in such a way that two partial beams of the light conductor unit which are aimed at the grating element, generate a superposition signal which is detectable by the light pickup unit and is a function of the linear or rotational movement and/or a position of the grating element. A modulation interferometer unit is connected upstream from the light conductor unit and has an arrangement for beam splitting into the two partial beams.
公开/授权文献
- US20120162658A1 INTERFEROMETRIC PATH AND/OR ROTATION MEASURING DEVICE 公开/授权日:2012-06-28
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