发明授权
- 专利标题： Electrostatic chuck
- 专利标题（中）： 静电吸盘
-
申请号： US13639283申请日： 2011-07-26
-
公开(公告)号： US08810992B2公开(公告)日： 2014-08-19
- 发明人: Hiroshi Ono
- 申请人： Hiroshi Ono
- 申请人地址： JP Kyoto
- 专利权人： Kyocera Corporation
- 当前专利权人： Kyocera Corporation
- 当前专利权人地址： JP Kyoto
- 代理机构： Volpe and Koenig, P.C.
- 优先权： JP2010-167247 20100726
- 国际申请： PCT/JP2011/066924 WO 20110726
- 国际公布： WO2012/014873 WO 20120202
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01T23/00 ; C04B35/185 ; C04B35/581 ; C04B35/111 ; C04B35/195
摘要：
There is provided an electrostatic chuck an electrostatic chuck in which it is hard for the power of suppressing residual adsorption to deteriorate over time. There is provided an electrostatic chuck including an insulating substrate, and an adsorption electrode, wherein a region which includes at least an upper face of the insulating substrate containing Mn is made of ceramics containing a first transition element composed of at least one of Fe and Cr, and a ratio C2/C1 of a content C2 (mol) of the first transition element to a content C1 (mol) of Mn contained in the insulating substrate is 1 or more.
公开/授权文献
- US20130120896A1 ELECTROSTATIC CHUCK 公开/授权日：2013-05-16
信息查询
IPC分类:
