发明授权
- 专利标题： Superlattice quantum well infrared detector
- 专利标题（中）： 超晶格量子阱红外探测器
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申请号： US13825864申请日： 2011-10-07
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公开(公告)号： US08803127B2公开(公告)日： 2014-08-12
- 发明人: David Kryskowski
- 申请人： David Kryskowski
- 申请人地址： US MI Dearborn Heights
- 专利权人： UD Holdings, LLC
- 当前专利权人： UD Holdings, LLC
- 当前专利权人地址： US MI Dearborn Heights
- 代理机构： Brooks Kushman P.C.
- 国际申请： PCT/US2011/055220 WO 20111007
- 国际公布： WO2012/051060 WO 20120419
- 主分类号： H01L29/06
- IPC分类号： H01L29/06 ; G01R31/26 ; H01L21/00
摘要：
In at least one embodiment, an infrared (IR) sensor comprising a thermopile is provided. The thermopile comprises a substrate and an absorber. The absorber is positioned above the substrate and a gap is formed between the absorber and the substrate. The absorber receives IR from a scene and generates an electrical output indicative of a temperature of the scene. The absorber is formed of a super lattice quantum well structure such that the absorber is thermally isolated from the substrate. In another embodiment, a method for forming an infrared (IR) detector is provided. The method comprises forming a substrate and forming an absorber with a plurality of alternating first and second layers with a super lattice quantum well structure. The method further comprises positioning the absorber about the substrate such that a gap is formed to cause the absorber to be suspended about the substrate.
公开/授权文献
- US20130299781A1 SUPERLATTICE QUANTUM WELL INFRARED DETECTOR 公开/授权日：2013-11-14
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