发明授权
US08793006B2 Method and apparatus for the controlled fabrication of micro and nanoscale structures by thermocapillary lithography
有权
用于通过热毛细管光刻控制制造微结构和纳米级结构的方法和装置
- 专利标题: Method and apparatus for the controlled fabrication of micro and nanoscale structures by thermocapillary lithography
- 专利标题(中): 用于通过热毛细管光刻控制制造微结构和纳米级结构的方法和装置
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申请号: US12626239申请日: 2009-11-25
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公开(公告)号: US08793006B2公开(公告)日: 2014-07-29
- 发明人: Sandra M. Troian
- 申请人: Sandra M. Troian
- 申请人地址: US CA Pasadena
- 专利权人: California Institute of Technology
- 当前专利权人: California Institute of Technology
- 当前专利权人地址: US CA Pasadena
- 代理机构: KPPB LLP
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
An apparatus and method of controllably stimulating the growth and evolution of 2D and 3D structures from a thin film mass transfer process such that complex devices can be designed and fabricated having engineered features of different heights and separation distances in a single or few process steps are provided. More specifically, the apparatus and method allows for the construction of engineered temperature gradient fields capable of controlling for, and taking into account, proximity effects during the growth and evolution of adjacent structures, which in turn allows for the production of technologically significant micro and nanoscale devices in a number of fields.
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