Invention Grant
- Patent Title: Apparatus for purifying a controlled-pressure environment
- Patent Title (中): 用于净化受控压力环境的装置
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Application No.: US13924859Application Date: 2013-06-24
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Publication No.: US08790603B2Publication Date: 2014-07-29
- Inventor: Guorong V. Zhuang , Gildardo Delgado
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Simpson & Simpson, PLLC
- Main IPC: B01D7/00
- IPC: B01D7/00 ; B01D53/00 ; B01D53/74 ; F04B53/00 ; G05D99/00

Abstract:
An apparatus for purifying a controlled-pressure environment in a chamber, including: a piece of lithium-aluminum alloy located in the chamber; an activation element arranged to impart energy to the piece of lithium-aluminum alloy to sublimate lithium from the piece of lithium-aluminum alloy; a feedback control system including a sensor system arranged to measure a condition within the chamber, and a controller in communication with the sensor and configured to control operation of the activation element according to an evaluation of the condition; and a collection plate located in the chamber and arranged to form a layer of the sublimated lithium on a surface of the collection plate.
Public/Granted literature
- US20140004025A1 APPARATUS FOR PURIFYING A CONTROLLED-PRESSURE ENVIRONMENT Public/Granted day:2014-01-02
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