发明授权
- 专利标题: Three-dimensional filter enables adaptive focus sensing
- 专利标题(中): 三维滤波器实现了自适应聚焦检测
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申请号: US13738358申请日: 2013-01-10
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公开(公告)号: US08785835B1公开(公告)日: 2014-07-22
- 发明人: Daniel R. Marshall
- 申请人: Daniel R. Marshall
- 代理机构: Your Intellectual Property Matters, LLC
- 代理商 Robert A. Frohwerk
- 主分类号: H01J3/14
- IPC分类号: H01J3/14 ; G01J3/50 ; G01J1/04
摘要:
This focus sensor is readily usable in a system using pupil obscuration to measure the state of focus of a light beam. A scattering volumetric filter modifies a three-dimensional wavefront so that focus can be detected by a two-dimensional detector for conversion to a one-dimensional signal having values of plus, zero and minus. This diffusing filter comprises sub wavelength particles having a high index of refraction suspended in an adhesive to produce a solid diffuser. This focus sensor enables a well-behaved focus curve having a constant slope near best focus, while maintaining a slope that is either constant or monotonic at a minimal rate over an extended distance to support a long capture-range over which a focus-controlling servo-mechanism can acquire and maintain focus in the presence of corrupting target surface topography or optical defects.
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