发明授权
US08778600B2 Method of manufacturing high resolution organic thin film pattern 有权
制造高分辨率有机薄膜图案的方法

Method of manufacturing high resolution organic thin film pattern
摘要:
A method of forming a high resolution organic thin film pattern, the method including forming a first organic layer on a substrate; selectively removing the first organic layer by selectively irradiating light energy onto the first organic layer, and forming a remaining part of the first organic layer as a sacrifice layer; forming a second organic layer on the substrate and the entire surface of the sacrifice layer; and lifting off the second organic layer formed on the sacrifice layer by removing the sacrifice layer using a solvent, and forming the remaining second organic layer as a second organic layer pattern.
信息查询
0/0