Invention Grant
US08763161B2 Zero thermal expansion, low heat transfer, variable temperature sample assembly for probe microscopy
有权
零热膨胀，低热传递，可变温度样品组件用于探针显微镜
- Patent Title: Zero thermal expansion, low heat transfer, variable temperature sample assembly for probe microscopy
- Patent Title (中): 零热膨胀，低热传递，可变温度样品组件用于探针显微镜
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Application No.: US13622623Application Date: 2012-09-19
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Publication No.: US08763161B2Publication Date: 2014-06-24
- Inventor: Rachel Cannara , Fred Sharifi , Zhao Deng
- Applicant: The National Institute of Standards and Technology
- Applicant Address: US DC Washington
- Assignee: The United States of America, as Represented by the Secretary of Commerce, The National Institute of Standards and Technology
- Current Assignee: The United States of America, as Represented by the Secretary of Commerce, The National Institute of Standards and Technology
- Current Assignee Address: US DC Washington
- Agency: Rankin, Hill & Clark LLP
- Agent Mark E. Bandy
- Main IPC: G01Q30/10
- IPC: G01Q30/10
Abstract:
A variable temperature assembly for scanning probe microscopy (SPM) is described which minimizes or eliminates motion of the sample caused by the thermal expansion or contraction of the sample holder assembly and platform/scanning stage on which the assembly is mounted, and minimizes heating or cooling of the platform/stage. In heater form, the variable temperature assembly includes a thin boron nitride puck with one or more high-resistivity wires embedded along an underside of the puck. The puck is suspended from its polished top surface by posts that are secured to the microscope stage. All thermal expansion of the puck occurs in the downward direction, away from the SPM probe-sample interface, thus eliminating relative motion between the probe tip and sample surface. The top surface of the puck remains stationary as a result of the unique geometry of the posts and the puck-post attachment configuration described herein.
Public/Granted literature
- US20130212750A1 ZERO THERMAL EXPANSION, LOW HEAT TRANSFER, VARIABLE TEMPERATURE SAMPLE ASSEMBLY FOR PROBE MICROSCOPY Public/Granted day:2013-08-15
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