发明授权
- 专利标题: Photoresist composition
- 专利标题(中): 光刻胶组成
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申请号: US13443155申请日: 2012-04-10
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公开(公告)号: US08753796B2公开(公告)日: 2014-06-17
- 发明人: Koji Ichikawa , Hiromu Sakamoto , Yuichi Mukai
- 申请人: Koji Ichikawa , Hiromu Sakamoto , Yuichi Mukai
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2011-089064 20110413
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/38
摘要:
The present invention provides a photoresist composition comprising a salt represented by the formula (I): wherein R1 and R2 independently each represent a fluorine atom or a C1-C6 perfluoroalkyl group, X1 represents a C1-C17 divalent saturated hydrocarbon group, etc., s1 represents 1 or 2, and t1 represents 0 or 1, with proviso that sum of s1 and t1 is 1 or 2, R3 represents a C1-C12 saturated hydrocarbon group, etc., u1 represents an integer of 0 to 8, and (Z1)+ represents an organic cation,a salt represented by the formula (II-0): wherein R4 represents a C1-C24 hydrocarbon group etc., X2 represents a C1-C6 alkanediyl group etc., and (Z2)+ represents an organic cation, anda resin being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
公开/授权文献
- US20120264055A1 PHOTORESIST COMPOSITION 公开/授权日:2012-10-18
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