发明授权
- 专利标题: Salt and photoresist composition containing the same
- 专利标题(中): 含有其的盐和光致抗蚀剂组合物
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申请号: US12786738申请日: 2010-05-25
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公开(公告)号: US08735044B2公开(公告)日: 2014-05-27
- 发明人: Koji Ichikawa , Isao Yoshida
- 申请人: Koji Ichikawa , Isao Yoshida
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2009-129349 20090528
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; C07C303/32 ; G03F7/004
摘要:
A salt represented by the formula (a): wherein Q1 and Q2 each independently represent a fluorine atom etc., X1 represents a single bond etc., X2 represents a single bond etc., Y1 represents a C3-C6 alicyclic hydrocarbon group etc., with the proviso that —X2—Y1 group has one or more fluorine atoms, and Z+ represents an organic counter cation, and a photoresist composition comprising the salt represented by the formula (a) and a resin comprising a structural unit having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
公开/授权文献
- US20100304293A1 SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME 公开/授权日:2010-12-02
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