Invention Grant
- Patent Title: Acoustic sensor and method of manufacturing the same
- Patent Title (中): 声传感器及其制造方法
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Application No.: US13796018Application Date: 2013-03-12
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Publication No.: US08722446B2Publication Date: 2014-05-13
- Inventor: Jaewoo Lee , Chang Han Je , Woo Seok Yang , Jongdae Kim
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2010-0103368 20101022
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.
Public/Granted literature
- US20130185928A1 ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-07-25
Information query
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