发明授权
US08721910B2 Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane
有权
用于制造用于喷雾装置的MEMS技术中的喷嘴集成膜的方法和使用这种膜的喷涂装置的方法
- 专利标题： Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane
- 专利标题（中）： 用于制造用于喷雾装置的MEMS技术中的喷嘴集成膜的方法和使用这种膜的喷涂装置的方法
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申请号： US13754510申请日： 2013-01-30
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公开(公告)号： US08721910B2公开(公告)日： 2014-05-13
- 发明人: Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Marco Mantovani
- 申请人： STMicroelectronics S.r.l.
- 申请人地址： IT Agrate Brianza
- 专利权人： STMicroelectronics S.r.l.
- 当前专利权人： STMicroelectronics S.r.l.
- 当前专利权人地址： IT Agrate Brianza
- 代理机构： Seed IP Law Group PLLC
- 优先权： ITTO2008A000980 20081223
- 主分类号： B44C1/22
- IPC分类号： B44C1/22
摘要：
A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.
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