Invention Grant
US08721048B2 Substrate for liquid discharge head and liquid discharge head 有权
液体排放头和排液头基板

Substrate for liquid discharge head and liquid discharge head
Abstract:
The reduction in reliably of a liquid discharge head due to the dissolution of a protective layer is suppressed. A substrate for a liquid discharge head includes a base substrate, a heat-generating resistive layer placed on the base substrate, a pair of lines placed on the base substrate, and a protective layer covering the heat-generating resistive layer and the lines. The protective layer contains a material represented by the formula SixCyNx, where x+y+z=100, 30≦x≦59, y≧5, and z≧15 on an atomic percent basis.
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