Invention Grant
- Patent Title: Method of manufacturing a monolithic duplexer
- Patent Title (中): 制造单片双工器的方法
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Application No.: US12647188Application Date: 2009-12-24
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Publication No.: US08720023B2Publication Date: 2014-05-13
- Inventor: Yun-kwon Park , In-sang Song , Seok-chul Yun , Seog-woo Hong , Byeoung-ju Ha , Dong-ha Shim , Hae-seok Park , Kuang-woo Nam , Duck-hwan Kim
- Applicant: Yun-kwon Park , In-sang Song , Seok-chul Yun , Seog-woo Hong , Byeoung-ju Ha , Dong-ha Shim , Hae-seok Park , Kuang-woo Nam , Duck-hwan Kim
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2004-0096120 20041123
- Main IPC: H03H9/15
- IPC: H03H9/15 ; H03H3/007

Abstract:
A method for fabricating subminiature, high-performance monolithic duplexer is disclosed. The method comprises depositing and patterning a lower electrode on an upper surface of an insulation layer on a substrate, so as to expose a first part of the insulation layer; depositing a piezoelectric layer on an upper surface of the exposed insulation layer and the lower electrode; depositing a metal on the upper part of the piezoelectric layer and patterning the metal to form a resonance part and a trimming inductor, wherein the lower electrode electrically couples the resonance part and the trimming inductor; fabricating air gap type FBARs (film bulk acoustic resonances) by forming a cavity by etching the substrate under the resonance part; and bonding a packaging substrate on the substrate, the packaging substrate having a phase shifting part which substantially prevents inflow of signal between the air gap type FBARs.
Public/Granted literature
- US20100095497A1 MONOLITHIC DUPLEXER Public/Granted day:2010-04-22
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