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US08707894B2 Mask frame assembly for thin film deposition and method of assembling the same 有权
用于薄膜沉积的面罩框架组件及其组装方法

Mask frame assembly for thin film deposition and method of assembling the same
摘要：
A mask frame assembly for thin film deposition, the mask frame assembly including a frame having an opening; a plurality of masks having deposition patterns, the masks being fixed to the frame such that the deposition patterns extend over the opening; and a balance stick being fixed to the frame such that the balance stick is between two of the plurality of masks, the balance stick made from an elastically tensile material.
摘要（中）：

一种用于薄膜沉积的面罩框架组件，所述面罩框架组件包括具有开口的框架; 具有沉积图案的多个掩模，所述掩模固定到所述框架，使得所述沉积图案在所述开口上延伸; 以及平衡杆，其被固定到所述框架上，使得所述平衡杆在所述多个掩模中的两个之间，所述平衡杆由弹性拉伸材料制成。

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