发明授权
- 专利标题: Imprint apparatus and method of manufacturing article
- 专利标题(中): 印刷装置及其制造方法
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申请号: US13101614申请日: 2011-05-05
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公开(公告)号: US08703035B2公开(公告)日: 2014-04-22
- 发明人: Hiroshi Sato
- 申请人: Hiroshi Sato
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2010-112664 20100514
- 主分类号: B28B11/08
- IPC分类号: B28B11/08
摘要:
An imprint apparatus includes a detector and an adjusting device. A second mark formed on a substrate includes a grating pattern having grating pitches in first and second directions which are respectively parallel to first and second axes which are parallel to a pattern surface of a mold and orthogonal to each other. A first mark formed on the mold includes a grating pattern having a grating pitch in the first direction. The first and second marks have different grating pitches in the first direction. The detector includes an image sensor, and an optical system which forms a moire fringe on an image sensing surface of the image sensor. The adjusting device adjusts, in a plane including the second axis and a third axis that is perpendicular to the first and second axes, an angle between the optical axis of the detector and the third axis.
公开/授权文献
- US20110278768A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE 公开/授权日:2011-11-17
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