- 专利标题: Systems and methods for a pressure sensor having a two layer die structure
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申请号: US13778465申请日: 2013-02-27
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公开(公告)号: US08701496B1公开(公告)日: 2014-04-22
- 发明人: Gregory C. Brown
- 申请人: Honeywell International Inc.
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理机构: Fogg & Powers LLC
- 主分类号: G01L7/08
- IPC分类号: G01L7/08
摘要:
Systems and methods for a pressure sensor are provided, where the pressure sensor comprises a housing having a high side input port that allows a high pressure media to enter a high side of the housing and a low side input port that allows a low pressure media to enter a low side of the housing when the housing is placed in an environment containing the high and low pressure media; a substrate mounted within the housing; a stress isolation member mounted to the substrate; a die stack having sensing circuitry bonded to the stress isolation member; a low side atomic layer deposition (ALD) applied to surfaces, of the substrate, the stress isolation member, and the die stack, exposed to the low side input port; and a high side ALD applied to surfaces, of the stress isolation member and the die stack, exposed to the high side input port.
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