发明授权
US08687203B2 Method and apparatus for determining a shape of an optical test surface 有权
用于确定光学测试表面的形状的方法和装置

  • 专利标题: Method and apparatus for determining a shape of an optical test surface
  • 专利标题(中): 用于确定光学测试表面的形状的方法和装置
  • 申请号: US13399716
    申请日: 2012-02-17
  • 公开(公告)号: US08687203B2
    公开(公告)日: 2014-04-01
  • 发明人: Bernd Doerband
  • 申请人: Bernd Doerband
  • 申请人地址: DE Oberkochen
  • 专利权人: Carl Zeiss SMT GmbH
  • 当前专利权人: Carl Zeiss SMT GmbH
  • 当前专利权人地址: DE Oberkochen
  • 代理机构: Sughrue Mion, PLLC
  • 主分类号: G01B11/02
  • IPC分类号: G01B11/02
Method and apparatus for determining a shape of an optical test surface
摘要:
A method of determining a shape of an optical test surface (14) includes: with adaptation optics (20), adapting a wavefront of a measuring beam (30) to a desired shape of the optical test surface (14), interferometrically measuring the shape of the optical test surface (14) with the adapted measuring beam, irradiating the adapted measuring beam at different angles of incidence onto the optical test surface and respectively measuring the wavefront of the measuring beam after the interaction of the measuring beam with the optical test surface (14), establishing the effect of the adaptation optics (20) upon the interferometric measurement result from the wavefronts measured for the individual angles of incidence, and determining the shape of the optical test surface (14) by removing the established effect of the adaptation optics (20) from the interferometric measurement result.
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