发明授权
- 专利标题: Nonvolatile nano-electromechanical system device
- 专利标题(中): 非易失性纳米机电系统装置
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申请号: US13566053申请日: 2012-08-03
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公开(公告)号: US08681409B2公开(公告)日: 2014-03-25
- 发明人: David J. Frank , Guy Cohen
- 申请人: David J. Frank , Guy Cohen
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A nonvolatile nano-electromechanical system device is provided and includes a cantilever structure, including a beam having an initial shape, which is supported at one end thereof by a supporting base and a beam deflector, including a phase change material (PCM), disposed on a portion of the beam in a non-slip condition with a material of the beam, the PCM taking one of an amorphous phase or a crystalline phase and deflecting the beam from the initial shape when taking the crystalline phase.
公开/授权文献
- US20120293236A1 NONVOLATILE NANO-ELECTROMECHANICAL SYSTEM DEVICE 公开/授权日:2012-11-22
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