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US08681409B2 Nonvolatile nano-electromechanical system device 失效
非易失性纳米机电系统装置

Nonvolatile nano-electromechanical system device
摘要:
A nonvolatile nano-electromechanical system device is provided and includes a cantilever structure, including a beam having an initial shape, which is supported at one end thereof by a supporting base and a beam deflector, including a phase change material (PCM), disposed on a portion of the beam in a non-slip condition with a material of the beam, the PCM taking one of an amorphous phase or a crystalline phase and deflecting the beam from the initial shape when taking the crystalline phase.
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