发明授权
- 专利标题: Light control element and optical waveguide circuit
- 专利标题(中): 光控元件和光波导电路
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申请号: US12999991申请日: 2009-05-14
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公开(公告)号: US08676017B2公开(公告)日: 2014-03-18
- 发明人: Yutaka Urino
- 申请人: Yutaka Urino
- 申请人地址: JP Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2008-166997 20080626
- 国际申请: PCT/JP2009/002120 WO 20090514
- 国际公布: WO2009/157128 WO 20091230
- 主分类号: G02B6/10
- IPC分类号: G02B6/10 ; G02B6/26
摘要:
A light control element includes three or more silicon thin-film layers (522, 524, 526) placed on a first dielectric layer (521), second dielectric layers (523, 525) placed between the three or more silicon thin-film layers (522, 524, 526), and a third dielectric layer (529) placed to surround the silicon thin-film layers and the second dielectric layers. The three or more silicon thin-film layers are arranged to partially overlap with one anther. In the part where the silicon thin-film layers overlap, the second dielectric layers are placed between the silicon thin-film layers. In the three or more silicon thin-film layers, the silicon thin-film layers adjacent to each other have different conductivity types.
公开/授权文献
- US20110097030A1 LIGHT CONTROL ELEMENT AND OPTICAL WAVEGUIDE CIRCUIT 公开/授权日:2011-04-28
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