Invention Grant
US08659326B1 Switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches 有权
开关装置包括用于致动微机电系统(MEMS)开关的门控电路

Switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches
Abstract:
A switching apparatus, as may be configured to actuate stacked MEMS switches, may include a switching circuitry (34) including a MEMS switch (36) having a beam (16) made up of a first movable actuator (17) and a second movable actuator (19) electrically connected by a common connector (20) and arranged to selectively establish an electrical current path through the first and second movable actuators in response to a gate control signal applied to the gates of the switch to actuate the movable actuators. The apparatus may further include a gating circuitry (32) to generate the gate control signal applied to gates of the switch. The gating circuitry may include a driver channel (40) electrically coupled to the common connector and may be adapted to electrically float with respect to a varying beam voltage, and may be electrically referenced between the varying beam voltage and a local electrical ground of the gating circuitry.
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