发明授权
- 专利标题： Resonator and fabrication method thereof
- 专利标题（中）： 谐振器及其制造方法
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申请号： US12388157申请日： 2009-02-18
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公开(公告)号： US08659098B2公开(公告)日： 2014-02-25
- 发明人: Yun-Kwon Park , Byeoung-Ju Ha , Byeong-Kwon Ju , Jae-Sung Rieh , In-Sang Song , Jin-Woo Lee , Jea-Shik Shin , Young-Min Park
- 申请人： Yun-Kwon Park , Byeoung-Ju Ha , Byeong-Kwon Ju , Jae-Sung Rieh , In-Sang Song , Jin-Woo Lee , Jea-Shik Shin , Young-Min Park
- 申请人地址： KR Suwon-si KR Seoul
- 专利权人： Samsung Electronics Co., Ltd.,Korea University Industrial and Academic Collaboration Foundation
- 当前专利权人： Samsung Electronics Co., Ltd.,Korea University Industrial and Academic Collaboration Foundation
- 当前专利权人地址： KR Suwon-si KR Seoul
- 代理机构： NSIP Law
- 优先权： KR10-2008-0039469 20080428
- 主分类号： H01L29/84
- IPC分类号： H01L29/84
摘要：
A resonator fabrication method is provided. A method includes providing a plurality of electrode patterns disposed apart from each other on a substrate using a nano-imprint technique; and forming an extended electrode pattern connected to a plurality of electrode patterns, and forming a nano structure laid across an extended electrode patterns. Therefore, a nano-electromechanical system (NEMS) resonator is easily fabricated at a nanometer level.
公开/授权文献
- US20090267706A1 RESONATOR AND FABRICATION METHOD THEREOF 公开/授权日：2009-10-29
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