发明授权
- 专利标题: Based device risk assessment
- 专利标题(中): 基于设备风险评估
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申请号: US13399805申请日: 2012-02-17
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公开(公告)号: US08656323B2公开(公告)日: 2014-02-18
- 发明人: Allen Park , Youseung Jin , SungChan Cho , Barry Saville
- 申请人: Allen Park , Youseung Jin , SungChan Cho , Barry Saville
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
The process for designed based assessment includes the following steps. First, the process defines multiple patterns of interest (POIs) utilizing design data of a device and then generates a design based classification database. Further, the process receives one or more inspection results. Then, the process compares the inspection results to each of the plurality of POIs in order to identify occurrences of the POIs in the inspection results. In turn, the process determines yield impact of each POI utilizing process yield data and monitors a frequency of occurrence of each of the POIs and the criticality of the POIs in order to identify process excursions of the device. Finally, the process determines a device risk level by calculating a normalized polygon frequency for the device utilizing a frequency of occurrence for each of the critical polygons and a criticality for each of the critical polygons.
公开/授权文献
- US20120216169A1 DESIGN BASED DEVICE RISK ASSESSMENT 公开/授权日:2012-08-23
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