发明授权
- 专利标题: Wafer cassette transportation method and system thereof
- 专利标题(中): 晶圆盒输送方法及其系统
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申请号: US12243323申请日: 2008-10-01
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公开(公告)号: US08655483B2公开(公告)日: 2014-02-18
- 发明人: Chin-Hsiao Chuang , Yu-Kun Chen
- 申请人: Chin-Hsiao Chuang , Yu-Kun Chen
- 申请人地址: TW Taoyuan County
- 专利权人: Inotera Memories, Inc.
- 当前专利权人: Inotera Memories, Inc.
- 当前专利权人地址: TW Taoyuan County
- 代理机构: Rosenberg, Klein & Lee
- 优先权: TW97128294A 20080725
- 主分类号: G06F7/00
- IPC分类号: G06F7/00
摘要:
A wafer cassette transportation method includes the steps: (a) Provide a monitoring system, overhead platforms, a detection system, and a plurality of transportation systems; (b) The detection system detects whether or not any overhead platform has a wafer cassette and generates and transmits first signals to the monitoring system; (c) The monitoring system reads the first signals and instructs one of the transportation systems to move the wafer cassette to an empty overhead platform; (d) The detection system detects whether or not any overhead platform has a wafer cassette and generates and transmits second signals to the monitoring system; and (e) The monitoring system reads the second signals and instructs another transportation system to move the wafer cassette away from the overhead platform, so as to enhance the transportation speed of the wafer cassette and lower the manufacturing cost. The present invention further provides a wafer cassette transportation system.
公开/授权文献
- US20100023158A1 WAFER CASSETTE TRANSPORTATION METHOD AND SYSTEM THEREOF 公开/授权日:2010-01-28
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