发明授权
- 专利标题: Component having a micromechanical microphone structure, and method for its production
- 专利标题(中): 具有微机械麦克风结构的部件及其制造方法
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申请号: US13259570申请日: 2010-04-07
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公开(公告)号: US08637945B2公开(公告)日: 2014-01-28
- 发明人: Frank Reichenbach , Thomas Buck , Jochen Zoellin , Franz Laermer , Ulrike Scholz , Kathrin van Teeffelen , Christina Leinenbach
- 申请人: Frank Reichenbach , Thomas Buck , Jochen Zoellin , Franz Laermer , Ulrike Scholz , Kathrin van Teeffelen , Christina Leinenbach
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102009026682 20090603
- 国际申请: PCT/EP2010/054583 WO 20100407
- 国际公布: WO2010/139498 WO 20101209
- 主分类号: H01L29/84
- IPC分类号: H01L29/84
摘要:
A component having a robust, but acoustically sensitive microphone structure is provided and a simple and cost-effective method for its production. This microphone structure includes an acoustically active diaphragm, which functions as deflectable electrode of a microphone capacitor, a stationary, acoustically permeable counter element, which functions as counter electrode of the microphone capacitor, and an arrangement for detecting and analyzing the capacitance changes of the microphone capacitor. The diaphragm is realized in a diaphragm layer above the semiconductor substrate of the component and covers a sound opening in the substrate rear. The counter element is developed in a further layer above the diaphragm. This further layer generally extends across the entire component surface and compensates level differences, so that the entire component surface is largely planar according to this additional layer. This allows a foil to be applied on the layer configuration of the microphone structures exposed in the wafer composite, which makes it possible to dice up the components in a standard sawing process.
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