发明授权
US08633638B2 Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor for reducing vibration sensitivity in at least one axis
有权
压电谐振元件，压电谐振器和用于在至少一个轴上降低振动灵敏度的加速度传感器
- 专利标题： Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor for reducing vibration sensitivity in at least one axis
- 专利标题（中）： 压电谐振元件，压电谐振器和用于在至少一个轴上降低振动灵敏度的加速度传感器
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申请号： US13784538申请日： 2013-03-04
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公开(公告)号： US08633638B2公开(公告)日： 2014-01-21
- 发明人: Masayuki Kikushima
- 申请人： Seiko Epson Corporation
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Oliff & Berridge, PLC
- 优先权： JP2007-285890 20071102
- 主分类号： H03H9/19
- IPC分类号： H03H9/19 ; H03H9/215
摘要：
A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.
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