发明授权
- 专利标题: Solid-state imaging device and method for making the same, and manufacturing substrate for solid-state imaging device
- 专利标题(中): 固态成像装置及其制造方法,以及制造用于固态成像装置的基板
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申请号: US13355171申请日: 2012-01-20
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公开(公告)号: US08633556B2公开(公告)日: 2014-01-21
- 发明人: Tetsuya Ikuta , Yuki Miyanami
- 申请人: Tetsuya Ikuta , Yuki Miyanami
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Rader, Fishman & Grauer PLLC
- 优先权: JP2008-231779 20080910; JP2009-163729 20090710
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232 ; H01L31/0312 ; H01L31/032 ; H01L31/103
摘要:
A method for making a solid-state imaging device includes forming a pinning layer, which is a P-type semiconductor layer or an N-type semiconductor layer, on a first substrate by deposition; forming a semiconductor layer on the pinning layer; forming a photoelectric conversion unit in the semiconductor layer, the photoelectric conversion unit being configured to convert incident light into an electrical signal; forming, on the semiconductor layer, a transistor of a pixel unit and a transistor of a peripheral circuit unit disposed in the periphery of the pixel unit, and then forming a wiring section on the semiconductor layer; bonding a second substrate on the wiring section; and removing the first substrate after the second substrate is bonded.
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