发明授权
- 专利标题： Substrate processing apparatus having electrode member
- 专利标题（中）： 具有电极部件的基板处理装置
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申请号： US12146790申请日： 2008-06-26
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公开(公告)号： US08623173B2公开(公告)日： 2014-01-07
- 发明人: Hyoung-Kyu Son
- 申请人： Hyoung-Kyu Son
- 申请人地址： KR Seongnam-Si
- 专利权人： Advanced Display Process Engineering Co., Ltd.
- 当前专利权人： Advanced Display Process Engineering Co., Ltd.
- 当前专利权人地址： KR Seongnam-Si
- 代理机构： KED & Associates LLP
- 优先权： KR10-2007-0093859 20070914; KR10-2007-0093860 20070914
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; H01L21/306 ; F25B21/02
摘要：
An electrode member for generating plasma includes an electrode plate and a cooling unit having a plurality of thermoelectric modules that are thermally in contact with the electrode plate. The thermoelectric modules may regulate the temperature of the electrode plate based on the Peltier effect.
公开/授权文献
- US20090071524A1 SUBSTRATE PROCESSING APPARATUS HAVING ELECTRODE MEMBER 公开/授权日：2009-03-19
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