Invention Grant
- Patent Title: Coating apparatus
- Patent Title (中): 涂装设备
-
Application No.: US12947809Application Date: 2010-11-16
-
Publication No.: US08623142B2Publication Date: 2014-01-07
- Inventor: Shao-Kai Pei
- Applicant: Shao-Kai Pei
- Applicant Address: TW New Taipei
- Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Altis Law Group, Inc.
- Priority: TW99114373A 20100505
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; C23C16/452

Abstract:
A coating apparatus includes a base, actuators, separating boards and a gas guide grill. The base includes a carrying surface for supporting a workpiece. The base defines recesses on the carrying surface. The actuators include shafts rotatably located in the recesses correspondingly, and motors for driving the shafts. The separating boards are located above the carrying surface and securely connected to the shafts. The separating boards define chambers therebetween. The separating boards are capable of being rotated toward the carrying surface by the shafts. The gas guide grill is located above the base. The gas guide grill defines gas guide holes corresponding to the chambers respectively.
Public/Granted literature
- US20110271909A1 COATING APPARATUS Public/Granted day:2011-11-10
Information query
IPC分类: