Invention Grant
- Patent Title: Thin film transistor including selectively crystallized channel layer and method of manufacturing the thin film transistor
- Patent Title (中): 薄膜晶体管包括选择性结晶的沟道层和制造薄膜晶体管的方法
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Application No.: US11978581Application Date: 2007-10-30
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Publication No.: US08618543B2Publication Date: 2013-12-31
- Inventor: Eun-ha Lee , Dong-hun Kang , Jae-cheol Lee , Chang-jung Kim , Hyuck Lim
- Applicant: Eun-ha Lee , Dong-hun Kang , Jae-cheol Lee , Chang-jung Kim , Hyuck Lim
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2007-0038978 20070420
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
Provided are a thin film transistor (TFT) including a selectively crystallized channel layer, and a method of manufacturing the TFT. The TFT includes a gate, the channel layer, a source, and a drain. The channel layer is formed of an oxide semiconductor, and at least a portion of the channel layer contacting the source and the drain is crystallized. In the method of manufacturing the TFT, the channel layer is formed of an oxide semiconductor, and a metal component is injected into the channel layer so as to crystallize at least a portion of the channel layer contacting the source and the drain. The metal component can be injected into the channel layer by depositing and heat-treating a metal layer or by ion-implantation.
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