Invention Grant
US08618543B2 Thin film transistor including selectively crystallized channel layer and method of manufacturing the thin film transistor 有权
薄膜晶体管包括选择性结晶的沟道层和制造薄膜晶体管的方法

Thin film transistor including selectively crystallized channel layer and method of manufacturing the thin film transistor
Abstract:
Provided are a thin film transistor (TFT) including a selectively crystallized channel layer, and a method of manufacturing the TFT. The TFT includes a gate, the channel layer, a source, and a drain. The channel layer is formed of an oxide semiconductor, and at least a portion of the channel layer contacting the source and the drain is crystallized. In the method of manufacturing the TFT, the channel layer is formed of an oxide semiconductor, and a metal component is injected into the channel layer so as to crystallize at least a portion of the channel layer contacting the source and the drain. The metal component can be injected into the channel layer by depositing and heat-treating a metal layer or by ion-implantation.
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