Invention Grant
US08617789B2 Photoacid generator, method for producing the same, and resist composition comprising the same
有权
光生酸产生剂,其制备方法和含有它的抗蚀剂组合物
- Patent Title: Photoacid generator, method for producing the same, and resist composition comprising the same
- Patent Title (中): 光生酸产生剂,其制备方法和含有它的抗蚀剂组合物
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Application No.: US13367896Application Date: 2012-02-07
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Publication No.: US08617789B2Publication Date: 2013-12-31
- Inventor: Jung Hoon Oh , Jin Bong Shin , Tae Gon Kim , Dong Chul Seo
- Applicant: Jung Hoon Oh , Jin Bong Shin , Tae Gon Kim , Dong Chul Seo
- Applicant Address: KR Seoul
- Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Davidson, Davidson & Kappel, LLC
- Priority: KR1020110010655 20110207
- Main IPC: C07C69/76
- IPC: C07C69/76 ; G03F7/004

Abstract:
A photoacid generator represented by the following formula (1), a method for producing the photoacid generator, and a resist composition containing the photoacid generator are provided. wherein in the formula (1), Y1, Y2, X, R1, R2, n1, n2 and A+ have the same meanings as defined in the detailed description of the invention. The photoacid generator can maintain an appropriate contact angle at the time of ArF liquid immersion lithography, can reduce defects occurring during liquid immersion lithography, and has excellent solubility in resist solvents and excellent compatibility with resins. Furthermore, the photoacid generator can be produced by an efficient and simple method using an epoxy compound that is industrially easily available.
Public/Granted literature
- US20120203024A1 PHOTOACID GENERATOR, METHOD FOR PRODUCING THE SAME, AND RESIST COMPOSITION COMPRISING THE SAME Public/Granted day:2012-08-09
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